Semiconductor Industry
Selecting a rubber compound for the semiconductor industry is about finding the right balance between the specific application and a rubber compound. ERIKS already has many years of experience in this industry and can work with you to select the correct compound for your application.
Make your choice
Not sure which o-rings are suitable for your application? Choose the right rubber compound based on temperature range and hardness. Click on the different rubber compounds to find out more about them.
| Rubber compound | Hardness | Temperature range |
| FFKM - 4079 | 75 Shore | -10°C to +315°C |
| FFKM - 8085 | 80 Shore | -10°C to +225°C |
| FFKM - 9100 | 70 Shore | -10°C to +300°C |
FFKM - 4079
Kalrez® is a brand name of Dupont®, the ISO name is FFKM. Kalrez® is a material with a chemical resistance comparable with Teflon® and rubber properties close to those of Viton®. This compound is extremely stable at high temperatures and has excellent ageing resistance. Kalrez® 4079 has excellent chemical resistance and mechanical properties. The maximum temperature is 315°C. It is ideal for applications where the temperature varies. Compound 4079 is not suitable for use in hot water or steam. This compound should also never be used in combination with ethylene oxide or propylene oxide. Kalrez® compound 7075 outclasses compound 4079 in terms of its properties and is often more readily available.
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FFKM - 8085
Kalrez® is a brand name of Dupont®, the ISO name is FFKM. Kalrez® is a material with a chemical resistance comparable with Teflon® and rubber properties close to those of Viton®. This compound is extremely stable at high temperatures and has excellent ageing resistance. It is also known as Kalrez® Sahara 8085 and has been specially developed for the semiconductor industry, for minimal particles in NF3 plasma, and offers good thermal stability. The compound has excellent mechanical properties and can be used in both static and dynamic applications. It is beige in colour, and ultra-pure cleaning and packaging is standard for articles made with this compound.
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FFKM - 9100
Kalrez® is a brand name of Dupont®, the ISO name is FFKM. Kalrez® is a material with a chemical resistance comparable with Teflon® and rubber properties close to those of Viton®. This compound is extremely stable at high temperatures and has excellent ageing resistance. Kalrez® 9100 is a compound that has been developed for semiconductor plasmaceutical applications such as ALD, HDPCVD, PECVD, SACVD etc.
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Applications
Seals used in the semiconductor industry are deployed in many different applications. Typical applications include:
- Advanced ICs
- Optical fibre sensors
- Cooling electronic components
- MEMS (microelectromechanical systems )
- Medical applications (pacemakers, CT scanners)
Are you looking for an o-ring, or do you have questions about our products? Get in touch with one of our specialists.
